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Evaporation coating equipment Detailed ConsultingZHD-400 resistance evaporation coating machine (Three pairs of electrode evaporation / turbo-molecular pump ultra-vacuum system)
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| Production | ZHD-400 resistance evaporation coating machine |
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| Chamber | 400 mm×H400 mm, stainless steel vacuum chamber |
| Size of the substrate | 120 mm |
| Workpiece movement | ferrofluidic seal; adjustable and controllable revolution and Continuously Variable Transmission(CVT)(0-30RPM) |
| Evaporation electrode | Three pairs matched |
| Evaporation power | 3 sets |
| Vacuum system | molecular pump + mechanical pump |
| Ultimate vacuum | 5.0×10-5Pa |
| Pumping speed | Pumped from the atmosphere to 10-3Pa20min |
| Control | Vacuumize automatically |
| Alarm and protection | It alarms in time and executes appropriate protection measures when abnormal situations, such as water shortage, over-current, over-voltage and open circuit, happen on pumps and electrodes. |
| Optional components | Pairs of electrodes, refrigeration cycle machine |
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